- Tu, 02.05.2023 16:15 – Tu, 02.05.2023 18:15
- Dr. Andreas Dorsel - Senior Advisor, ZEISS Sparte Semiconductor Manufacturing Technology Carl Zeiss SMT
Leibnizstraße 13, 24118 Kiel
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Optics is boring - or is it not?
It will briefly be explained why the answer to the title question may be of interest to you. This is followed by an attempt to provide such an answer, using the various optical systems used in nano-lithography to produce modern highly integrated electronic circuits, so-called microchips. The latest developments in the field of EUV (extreme ultra-violet) are also discussed. Individual requirements for different components resulting from system requirements are examined in greater depth. The interaction between the optical subsystem and the lithography machine, the so-called wafer-scanner, which act in closely interlocking interaction, is also touched upon. At the end, possible barriers to the unlimited continuation of Moore's Law are outlined.